Synthesis of carbon nanotubes by ECR plasma-assisted chemical vapor deposition
نویسندگان
چکیده
منابع مشابه
Synthesis of carbon nanotubes by ECR plasma-assisted chemical vapor deposition
Carbon nanotubes have been grown using an electron cyclotron resonance (ECR) plasma source at a substrate temperature of 500 ◦C. Methane has been used as the source gas. A network of carbon nanotubes has been observed in scanning electron microscopy. Transmission electron microscopy revealed that the structure consists of straight, Y-junction and ring-like nanotubes. Further, electron diffracti...
متن کاملDendrimer-assisted low-temperature growth of carbon nanotubes by plasma-enhanced chemical vapor deposition.
Using a shielded growth approach and N2-annealed, nearly monodispersed Fe2O3 nanoparticles synthesized by interdendritic stabilization of Fe3+ species within fourth-generation poly(amidoamine) dendrimers, carbon nanotubes and nanofibers were successfully grown at low substrate temperatures (200-400 degrees C) by microwave plasma-enhanced chemical vapor deposition.
متن کاملDirect synthesis of single-walled carbon nanotubes bridging metal electrodes by laser-assisted chemical vapor deposition
Direct synthesis of single-walled carbon nanotubes SWNTs bridging prepatterned Mo electrodes has been achieved using laser-assisted chemical vapor deposition LCVD . The synthesized SWNTs are found predominantly semiconducting. By controlling the spot size of the focused laser beam, synthesis of SWNTs can be achieved in a localized manner, which is governed by the thermal and optical properties ...
متن کاملPulsed DC- Plasma Assisted Chemical Vapor Deposition of α-rich Nanostructured Tantalum Film: Synthesis and Characterization
This paper is an attempt to synthesize nanostructured tantalum films on medical grade AISI 316L stainless steel (SS) using pulsed DC plasma assisted chemical vapor deposition (PACVD). The impact of duty cycle (17-33%) and total pressure (3-10 torr) were studied using field emission scanning electron microscopy (FESEM), grazing incidence x-ray diffraction (GIXRD), nuclear reaction analysis (NRA)...
متن کاملDetermination of Optical Properties in Germanium Carbon Coatings Deposited by Plasma Enhanced Chemical Vapor Deposition
In this research, Germanium-carbon coatings were deposited on ZnS substrates by plasma enhanced chemical vapor deposition (PECVD) using GeH4 and CH4 precursors. Optical parameters of the Ge1-xCx coating such as refractive index, Absorption coefficient, extinction coefficient and band gap were measured by the Swanepoel method based on the transmittance spectrum. The results showed that the refra...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Applied Physics A
سال: 2005
ISSN: 0947-8396,1432-0630
DOI: 10.1007/s00339-003-2426-8